ULTRA-WIDE ANGLE MEMS SCANNER ARCHITECTURE

Description

An optical microscanner achieves wide rotation angles utilizing a curved reflector. The optical microscanner includes a moveable mirror for receiving an incident beam and reflecting the incident beam to produce a reflected beam and a Micro Electro-Mechanical System (MEMS) actuator that causes a linear displacement of the moveable minor. The curved reflector produces an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.

Aspects

The present invention relates in general to optical MEMS, and in particular, to optical scanner architectures using MEME. Embodiments of the present invention provide an optical microscanner capable of achieving wide rotation angles. In one embodiment, the optical microscanner includes a moveable minor optically coupled to receive an incident beam and operable to reflect the incident beam to produce a reflected beam, a Micro Electro-Mechanical System (MEMS) actuator coupled to the moveable mirror to cause a linear displacement of the moveable minor and a curved reflector operable to produce an angular rotation of the reflected beam based on the linear displacement of the moveable mirror.

Patenting Status

Patent Granted

Status

Patented

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