LONG RANGE TRAVEL MEMS ACTUATOR

الوصف

An electrostatic comb drive actuator for a MEMS device includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes fixed comb drive fingers and moveable comb drive fingers coupled to the flexure spring assembly and extending towards the fixed comb drive fingers. The comb drive fingers are divided equally between the first and second comb drive assemblies and placed symmetrically about a symmetry axis of the flexure spring assembly. When electrically energized, the moveable comb drive fingers of both the first and second comb drive assemblies simultaneously move towards the fixed comb drive fingers of the first and second comb drive assemblies.

النواحي

The present invention relates in general to Micro Electro-Mechanical Systems (MEMS) devices and in particular, to MEMS actuators. Embodiments of the present invention provide an electrostatic comb drive actuator for a Micro Electro-Mechanical System (MEMS) device with reduced side instability. The comb drive actuator includes a flexure spring assembly and first and second comb drive assemblies, each coupled to the flexure spring assembly on opposing sides thereof. Each of the first and second comb assemblies includes a fixed comb drive member having an elongate member with comb drive fingers extending from one side thereof and a moveable comb drive member having a center beam coupled to the flexure spring assembly and comb drive fingers extending from one side of the center beam towards the comb drive fingers of the fixed comb drive member.

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