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Capacitive micro-machined sensor force-feedback mode interface system

منذ 3 شهر 2 يوم

الوصف

Operating capacitive sensors in force feedback mode has many benefits, such as improved bandwidth, and lower sensitivity to process and temperature variation. To overcome, the non- linearity of the voltage-to-force relation in capacitive feedback, a two-level feedback signal is often used. Therefore, a single-bit Σ-Δ modulator represents a practical way to implement capacitive sensors interface circuits. However, high-Q parasitic modes that exist in high-Q sensors (operating in vacuum) cause a stability problem for the Σ-Δ loop, and hence, limit the applicability of Σ-Δ technique to such sensors. A solution is provided that allows stabilising the Σ-Δ loop, in the presence of high-Q parasitic modes. The solution is applicable to low or high order Σ-Δ based interfaces for capacitive sensors.

النواحي

The problem of stabilizing Σ-Δ electro-mechanical loops in the presence of high-Q parasitic modes is addressed. In one embodiment, introducing a second order finite impulse response (FIR) filter into the Σ-Δ electro-mechanical loop stabilizes the loop. This solution is supported by both theoretical and empirical results and is much simpler than other proposed techniques.

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